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Construction of reaction model and heat and mass transfer analysis in thermal CVD process

published_at 2015
DT12100656_Abstract.pdf
[abstract] 7.57 MB
DT12100656_FullText.pdf
[fulltext] 9.71 MB
Title
熱CVDプロセスにおける反応モデルの構築および熱物質移動解析
Construction of reaction model and heat and mass transfer analysis in thermal CVD process
Degree 博士(工学) Dissertation Number 理工博甲第656号 (2015-03-16)
Degree Grantors Yamaguchi University
[kakenhi]15501 grid.268397.1
Creators 羽鳥 祐耶
Resource Type doctoral thesis
Date Issued 2015
File Version Not Applicable (or Unknown)
Access Rights open access
Schools 大学院理工学研究科