Single-crystal diamond tools formed using a focused ion beam : tool life enhancement via heat treatment
Diamond and related materials Volume 49
Page 14-18
published_at 2014-10
Title
Single-crystal diamond tools formed using a focused ion beam : tool life enhancement via heat treatment
Creators
Kawasegi Noritaka
Creators
Ozaki Kazuma
Creators
Morita Noboru
Creators
Nishimura Kazuhito
Creator Keywords
Diamond
Ultra-precision machining
Single-crystal diamond tool
Focused ion beam
Heat treatment
Etching
Amorphous
Tool life
Languages
eng
Resource Type
journal article
Publishers
Elsevier
Date Issued
2014-10
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]0925-9635
[NCID]AA10819710
[isVersionOf]
[URI]http://www.sciencedirect.com/science/journal/09259635
Schools
大学院理工学研究科（工学）