Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot
Transactions of the ASME. Journal of vibration and acoustics Volume 115 Issue 4
Page 529-534
published_at 1993-10
Title
Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot
Languages
eng
Resource Type
journal article
Publishers
American Society of Mechanical Engineers
Date Issued
1993-10
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]1048-9002
[NCID]AA10745862
[isVersionOf]
[URI]http://scitation.aip.org/ASMEJournals/VibrationAcoustics/
Schools
大学院理工学研究科（工学）