Stress analysis of a silicon-wafer slicer cutting the crystal ingot
Transactions of the ASME. Journal of mechanical design Volume 115 Issue 4
Page 711-717
published_at 1993-12
Title
Stress analysis of a silicon-wafer slicer cutting the crystal ingot
Languages
eng
Resource Type
journal article
Publishers
American Society of Mechanical Engineers
Date Issued
1993-12
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]1050-0472
[NCID]AA10753248
[isVersionOf]
[URI]http://asmedl.aip.org/MechanicalDesign/
Schools
大学院理工学研究科（工学）