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Development of ID-blade slicer monitoring system for cutting 12-inch silicon ingot

International Journal of Applied Electromagnetics and Mechanics Volume 15 Issue 1-4 Page 67-72
published_at 2001
Title
Development of ID-blade slicer monitoring system for cutting 12-inch silicon ingot
Creators Jiang Zhongwei
Creators Fujiwara Shusuke
Creators Chonan Seiji
Creators Kawashima Kazuo
Creator Keywords
ID saw blade 12inch wafer slicer online monitoring system
Languages eng
Resource Type journal article
Publishers IOS Press
Date Issued 2001
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]1383-5416
[NCID]AA11051133
Schools 大学院理工学研究科(工学)