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Post-oxidation effects of Co-containing ferrite thin-film deposited by reactive ECR sputtering method

日本応用磁気学会学術講演概要集 Volume 25 Page 8-
published_at 2001
2009010283.pdf
[fulltext] 173 KB
Title
反応性ECRスパッタ法で作製したCo含有酸化鉄薄膜のポスト酸化処理効果
Post-oxidation effects of Co-containing ferrite thin-film deposited by reactive ECR sputtering method
Creators Hirata K.
Creators Yamamoto S.
Creators Kurisu H.
Creators Matsuura M.
Creators Doi T.
Creators Tamari K.
Languages jpn
Resource Type conference paper
Publishers 日本応用磁気学会
Date Issued 2001
Rights
Copyright : 日本応用磁気学会 (The Magnetics Society of Japan)()
File Version Version of Record
Access Rights open access
Relations
[ISSN]1340-8100
[NCID]AN10269644
Schools 大学院理工学研究科(工学)