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Magnetic properties of Co-Cr films prepared by sputtering using electron cyclotron resonance microwave plasma

日本応用磁気学会学術講演概要集 Volume 19 Page 6-
published_at 1995
2009010269.pdf
[fulltext] 133 KB
Title
ECRスパッタ法により作製したCo-Cr垂直磁気異方性膜の磁気特性
Magnetic properties of Co-Cr films prepared by sputtering using electron cyclotron resonance microwave plasma
Creators Sato K.
Creators Yamamoto S.
Creators Kurisu H.
Creators Matsuura M.
Languages jpn
Resource Type conference paper
Publishers 日本応用磁気学会
Date Issued 1995
Rights
Copyright : 日本応用磁気学会 (The Magnetics Society of Japan)()
File Version Version of Record
Access Rights open access
Relations
[ISSN]1340-8100
[NCID]AN10269644
Schools 大学院理工学研究科(工学)